Direct Write Lithography System
Agency: | |
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Level of Government: | Federal |
Category: |
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Opps ID: | NBD00159701467963083 |
Posted Date: | Jan 10, 2024 |
Due Date: | Jan 19, 2024 |
Source: | https://sam.gov/opp/86f74c0960... |
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- Contract Opportunity Type: Sources Sought (Original)
- All Dates/Times are: (UTC-08:00) PACIFIC STANDARD TIME, LOS ANGELES, USA
- Original Published Date: Jan 10, 2024 02:26 pm PST
- Original Response Date: Jan 19, 2024 02:00 pm PST
- Inactive Policy: 15 days after response date
- Original Inactive Date: Feb 03, 2024
-
Initiative:
- None
- Original Set Aside:
- Product Service Code: 9999 - MISCELLANEOUS ITEMS
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NAICS Code:
- 333242 - Semiconductor Machinery Manufacturing
-
Place of Performance:
Berkeley , CA 94720USA
Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to provide a direct write lithography system. The LBNL Microsystems Laboratory is a semiconductor processing facility specializing in the fabrication of various types of radiation detectors and integrated electronics on high resistivity silicon. The facility consists of 700 square feet of Class 10 clean room space with environmental control of +/-1F and +/-2% relative humidity. Process capabilities include high temperature oxidation, deposition of thin films, diffusion of impurity dopants, dry plasma etching, wet chemical etching and cleaning operations, and photolithography. A new lithography system is required at this time to improve reliability, flexibility and turnaround time to speed up R&D cycles. Please see the attached RFI document for details and response instructions.
- 1 Cyclotron Rd
- Berkeley , CA 94720
- USA
- Brian Zatkow
- bzatkow@lbl.gov
- Phone Number 510-495-2547
- Jan 10, 2024 02:26 pm PSTSources Sought (Original)
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